Supported by funding from Taiwan’s National Science and Technology Council (NSTC), the College of Advanced Technology at National Taiwan University (NTU) has established an Advanced Semiconductor Process Research Facility in the Excellence Research Building at NTU’s Shuiyuan Campus. The new facility is expected to further strengthen Taiwan’s technological and research competitiveness in the semiconductor sector, advance academic innovation, foster international collaboration, and cultivate industry-ready talent through partnerships with leading enterprises.

The project was funded with NT$300 million from the NSTC, complemented by approximately NT$100 million from NTU. The facility features a state-of-the-art cleanroom and a comprehensive suite of advanced characterization and fabrication equipment, including electron-beam lithography capable of achieving resolutions down to 8 nanometers, atomic layer deposition and etching systems, as well as nanomaterial and semiconductor device measurement platforms. Designed as a one-stop research environment, the facility supports the entire semiconductor R&D process, from device fabrication and process development to testing, analysis, and validation. It also serves as a shared innovation platform accessible to researchers and academic institutions throughout Taiwan.

Dr. Tung-Hsing Wu, Convener of the Project Office and President of National Chi Nan University, explained the initiative’s origins. He noted that semiconductor research infrastructure at many universities has historically lagged behind industry standards. To address this challenge, the NSTC supported the deployment of 60 key semiconductor research instruments across northern, central, and southern Taiwan. More importantly, the platform has been designed to provide nationwide access to advanced research resources. Faculty members, researchers, and students from any university in Taiwan can apply through a centralized online portal to conduct semiconductor-related research, regardless of where the equipment is physically located.

According to NTU, the project has attracted a growing number of users over the past three years. Students can utilize the facility’s advanced tools to conduct cutting-edge research, including the development of semiconductor devices reaching the 2-nanometer scale through photolithography technologies. While commercial semiconductor fabs primarily focus on mass production, universities are uniquely positioned to pursue exploratory and forward-looking research, creating valuable synergies with industry partners. Moving forward, NTU plans to further expand the facility’s service capacity, strengthen industry-academia collaboration, promote resource sharing, and deepen international academic exchanges.

The program has already established partnerships with several leading Taiwanese companies, including TSMC, Powerchip Semiconductor Manufacturing Corporation (PSMC), Etron Technology, Ennostar, Radiant Opto-Electronics, Innolux Corporation, and MA-tek. Collaborative projects have secured approximately NT$84 million in funding to date.

Key research areas include advanced semiconductor process technologies and equipment development, next-generation memory technologies, AI computing devices, silicon photonics, and advanced optoelectronic components. On the international front, NTU has partnered with the University of Pennsylvania to establish a Semiconductor Research Center, promoting joint research initiatives, cross-border talent development programs, and broader academic collaboration between Taiwan and the United States.

NEWS Reference: https://www.rti.org.tw/news?uid=3&pid=235055